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Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect

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PDF) Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material

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Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect

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Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication

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PDF) UV-Nanoimprint Lithography: Structure, Materials and Fabrication of Flexible Molds