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Micromachines, Free Full-Text
Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H
Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect
Nanomaterials, Free Full-Text
Fabrication of metallic microstructure on curved substrate by optical soft lithography and copper electroplating - ScienceDirect
PDF) Improved mold fabrication for the definition of high quality nanopatterns by Soft UV-Nanoimprint lithography using diluted PDMS material
Polymers in conventional and alternative lithography for the fabrication of nanostructures - ScienceDirect
Fabrication of MOSFETs by 3D soft UV-nanoimprint - ScienceDirect
Soft lithography - LNF Wiki
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication
Master Mold - an overview
PDF) UV-Nanoimprint Lithography: Structure, Materials and Fabrication of Flexible Molds